Abstract; Zinc oxide (ZnO) thin films were deposited by pulsed laser deposition technique for making ZnO/Al/SiO2/Si Bulk and Surface Acoustic Wave (BAW and SAW) transducers. The aim is to improve the piezoelectric properties of the ZnO films, which are strongly linked to their texture and microstructure. ZnO films with a wurtzite structure were deposited on […]
October 15, 2019 Rachid SIKADOUR 2017, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division BAW and SAW, Pulsed laser deposition, ZnO
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