Abstract; This paper focuses on the comparison of the RF performances of various advanced trap-rich (TR) siliconon-insulator (SOI) and porous silicon (PSi) substrates. The PSi substrates are produced by electroporisification starting either from cheap standard resistivity (10 Q·cm) silicon (PSi-S) or from the most widespread highly doped milliohm-centimeter Si wafers (PSi-M). Through small-signal RF measurements, […]
October 15, 2019 Rachid SIKADOUR 2018, Analog / Radio Frequency Integrated Circuits Team, Microelectronic & Nanotechnologie Division Coplanar waveguides, Radio frequency, Substrates
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