Abstract; In this work, we investigate numerically the propagation of Lamb waves in a film bulk acoustic resonator (FBAR) structure formed by piezoelectric ZnO layer sandwiched between two Mo electrodes coupled with Bragg reflectors; the system is thus considered as a phononic-crystal (PnC) plate. The aim is to suppress the first-order symmetric Lamb wave mode […]
October 15, 2019 Rachid SIKADOUR 2018, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Electro-mechanical systems, Sensors and actuators, Vibration control
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