FEM Modeling of Sensitive Layer Swelling Effect on Microbalance Gas Sensor Based on TFBAR Resonator

Abstract; The electromechanical response of a chemical gas sensor based on a TFBAR (Thin Film Bulk Acoustic Resonator) structure coated with a sensitive polymer layer was simulated with a FEM (Finite Elements Method) software (COMSOL Multiphysics®). The principle of sensing is based on the change of the mechanical properties of the polymer due to the […]

October 16, 2019 Rachid SIKADOUR , , , ,