Abstract; An electrical response of a microflow sensor would open a wide horizon of uses and should intensify the integration of MEMS (Micro-Electro-Mechanical-System) microfluidic-based LOC (Lab-On-Chip). This paper presents an original microflow sensor which will be able to measure a low fluid flow rate. The sensor is designed and optimized using a multiphysics modelling and […]
October 15, 2019 Rachid SIKADOUR 2017, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Method Simulation Electrical, Microfluidic Device Finite Element, PDMS
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