The heterostructure ZnO/Al/SiO2/Si fabrication for piezoelectric SAW and BAW transducers and sensors

Abstract; Zinc oxide (ZnO) thin films were deposited by pulsed laser deposition technique for making ZnO/Al/SiO2/Si Bulk and Surface Acoustic Wave (BAW and SAW) transducers. The aim is to improve the piezoelectric properties of the ZnO films, which are strongly linked to their texture and microstructure. ZnO films with a wurtzite structure were deposited on […]

October 15, 2019 Rachid SIKADOUR , , , ,