Abstract; Self-assembly through phase separation in block copolymers (BCPs) thin films represents an attractive route to create spontaneously ordered patterns at the sublithographic range. The cost effectiveness, the fast parallel processing time as well as the compatibility with the standard microelectronics technologies make it among the most promising techniques to meet the ever challenging feature […]
October 15, 2019 Rachid SIKADOUR 2017, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Block copolymer, Microphase separation, Self-assembly
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