Abstract; The electromechanical response of a chemical gas sensor based on a TFBAR (Thin Film Bulk Acoustic Resonator) structure coated with a sensitive polymer layer was simulated with a FEM (Finite Elements Method) software (COMSOL Multiphysics®). The principle of sensing is based on the change of the mechanical properties of the polymer due to the […]
October 16, 2019 Rachid SIKADOUR 2015, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Gas Sensor, TFBAR, ZnO
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