Abstract; Piezoelectric properties of ZnO thin films have been investigated for micro-electro-mechanical systems (MEMS). Wurtzite ZnO structure was prepared on different substrates (Si (1 0 0), Pt (1 1 1)/Ti/SiO2/Si and Al (1 1 1)/SiO2/Si) at different substrate temperatures (from 100 to 500 °C) by a pulsed laser deposition (PLD) technique. X-ray diffraction (XRD) characterization showed that the ZnO films were highly c-axis […]
October 16, 2019 Rachid SIKADOUR 2014, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Bulk acoustic waves (BAW), Pulsed laser deposition (PLD), Thin films Piezoelectricity
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