Abstract; The electromechanical response of a chemical gas sensor based on a TFBAR (Thin Film Bulk Acoustic Resonator) structure coated with a sensitive polymer layer was simulated with a FEM (Finite Elements Method) software (COMSOL Multiphysics®). The principle of sensing is based on the change of the mechanical properties of the polymer due to the […]
October 16, 2019 Rachid SIKADOUR 2015, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Gas Sensor, TFBAR, ZnO
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Abstract; Zinc oxide (ZnO) thin films were deposited by pulsed laser deposition technique for making ZnO/Al/SiO2/Si Bulk and Surface Acoustic Wave (BAW and SAW) transducers. The aim is to improve the piezoelectric properties of the ZnO films, which are strongly linked to their texture and microstructure. ZnO films with a wurtzite structure were deposited on […]
October 15, 2019 Rachid SIKADOUR 2017, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division BAW and SAW, Pulsed laser deposition, ZnO
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