{"id":7712,"date":"2019-09-22T14:25:10","date_gmt":"2019-09-22T14:25:10","guid":{"rendered":"http:\/\/10.1.5.53\/?page_id=7712"},"modified":"2019-09-24T12:33:09","modified_gmt":"2019-09-24T12:33:09","slug":"ion-implantation-area","status":"publish","type":"page","link":"https:\/\/www.cdta.dz\/en\/research-and-technology\/technology-platforms\/micro-fabrication-plateform\/process-section\/ion-implantation-area\/","title":{"rendered":"Ion implantation area"},"content":{"rendered":"<h1><span style=\"color: #1e73be\">Ion implantation area<\/span><\/h1>\n<p>A medium-current ionic implanter is used to introduce dopants into a platelet.<\/p>\n<h3><span style=\"color: #1e73be\">Equipment available in the ion implantation area\u00a0<\/span><\/h3>\n<ul>\n<li>VARIAN E220 Ion Implanter<\/li>\n<li>Species: B+(BF3), P+(PH3), As+(AsH3) and Ar.<\/li>\n<li>Dose range: from 2.0e12 to 5.0e15 ion\/cm2.<\/li>\n<li>Energy range: 15 to 200 KeV.<\/li>\n<li>Incidence angle: standard 7\u00b0.<\/li>\n<li>Diamond of the insert: 150 mm<\/li>\n<\/ul>\n<h3><span style=\"color: #1e73be\">Possible services in the ion implantation area<\/span><\/h3>\n<ul>\n<li>Doping of wafers (silicon) with two types of dopants: type P and type N.<\/li>\n<li>Amorphisation of crystalline structures (creation of defects in the structure).<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>Ion implantation area A medium-current ionic implanter is used to introduce dopants into a platelet. Equipment available in the ion implantation area\u00a0 VARIAN E220 Ion Implanter Species: B+(BF3), P+(PH3), As+(AsH3) and Ar. Dose range: from 2.0e12 to 5.0e15 ion\/cm2. Energy range: 15 to 200 KeV. Incidence angle: standard 7\u00b0. Diamond of the insert: 150 mm [&hellip;]<\/p>\n","protected":false},"author":46,"featured_media":2448,"parent":7694,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"division-page.php","meta":{"footnotes":""},"class_list":["post-7712","page","type-page","status-publish","has-post-thumbnail","hentry"],"_links":{"self":[{"href":"https:\/\/www.cdta.dz\/en\/wp-json\/wp\/v2\/pages\/7712\/"}],"collection":[{"href":"https:\/\/www.cdta.dz\/en\/wp-json\/wp\/v2\/pages\/"}],"about":[{"href":"https:\/\/www.cdta.dz\/en\/wp-json\/wp\/v2\/types\/page\/"}],"author":[{"embeddable":true,"href":"https:\/\/www.cdta.dz\/en\/wp-json\/wp\/v2\/users\/46\/"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cdta.dz\/en\/wp-json\/wp\/v2\/comments\/?post=7712"}],"version-history":[{"count":0,"href":"https:\/\/www.cdta.dz\/en\/wp-json\/wp\/v2\/pages\/7712\/revisions\/"}],"up":[{"embeddable":true,"href":"https:\/\/www.cdta.dz\/en\/wp-json\/wp\/v2\/pages\/7694\/"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cdta.dz\/en\/wp-json\/wp\/v2\/media\/2448\/"}],"wp:attachment":[{"href":"https:\/\/www.cdta.dz\/en\/wp-json\/wp\/v2\/media\/?parent=7712"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}