{"id":7641,"date":"2019-09-19T08:55:34","date_gmt":"2019-09-19T08:55:34","guid":{"rendered":"http:\/\/10.1.5.53\/?page_id=7641"},"modified":"2019-09-25T07:27:39","modified_gmt":"2019-09-25T07:27:39","slug":"zone-dimplantation-ionique","status":"publish","type":"page","link":"https:\/\/www.cdta.dz\/fr\/recherche-et-technologie\/plateformes-technologiques\/plateforme-de-micro-fabrication\/section-procedes\/zone-dimplantation-ionique\/","title":{"rendered":"Zone d\u2019implantation ionique"},"content":{"rendered":"<p>[vc_row][vc_column][vc_column_text]<\/p>\n<h1><span style=\"color: #3366ff\">Zone d\u2019implantation ionique<\/span><\/h1>\n<p>Un implanteur ionique \u00e0 courant moyen est utilis\u00e9 pour introduire des dopants dans une plaquette.<\/p>\n<h3><span style=\"color: #3366ff\">\u00c9quipements disponibles dans la zone d\u2019implantation ionique\u00a0<\/span><\/h3>\n<h4><span style=\"color: #3366ff\">Implanteur ionique VARIAN E220<\/span><\/h4>\n<ul>\n<li>Esp\u00e8ces : B+(BF3), P+(PH3), As+(AsH3) et Ar.<\/li>\n<li>Gamme de la dose : de 2.0e12 \u00e0 5.0e15 ion\/cm2.<\/li>\n<li>Gamme d\u2019\u00e9nergie : 15 \u00e0 200 KeV.<\/li>\n<li>Angle d\u2019incidence : standard 7\u00b0.<\/li>\n<li>Diamanter de la plaquette\u00a0: 150 mm<\/li>\n<\/ul>\n<h3><span style=\"color: #3366ff\">Prestations possibles dans la zone d\u2019implantation ionique<\/span><\/h3>\n<ul>\n<li>Dopage des plaquettes (silicium) avec deux types de dopants\u00a0: type P et Type N.<\/li>\n<li>Amorphisation des structures cristallines\u00a0(cr\u00e9ation des d\u00e9fauts dans la structure).<\/li>\n<\/ul>\n<p>[\/vc_column_text][\/vc_column][\/vc_row]<\/p>\n","protected":false},"excerpt":{"rendered":"<p>[vc_row][vc_column][vc_column_text] Zone d\u2019implantation ionique Un implanteur ionique \u00e0 courant moyen est utilis\u00e9 pour introduire des dopants dans une plaquette. \u00c9quipements disponibles dans la zone d\u2019implantation ionique\u00a0 Implanteur ionique VARIAN E220 Esp\u00e8ces : B+(BF3), P+(PH3), As+(AsH3) et Ar. Gamme de la dose : de 2.0e12 \u00e0 5.0e15 ion\/cm2. Gamme d\u2019\u00e9nergie : 15 \u00e0 200 KeV. Angle [&hellip;]<\/p>\n","protected":false},"author":46,"featured_media":2195,"parent":6875,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"division-page.php","meta":{"footnotes":""},"class_list":["post-7641","page","type-page","status-publish","has-post-thumbnail","hentry"],"_links":{"self":[{"href":"https:\/\/www.cdta.dz\/fr\/wp-json\/wp\/v2\/pages\/7641\/"}],"collection":[{"href":"https:\/\/www.cdta.dz\/fr\/wp-json\/wp\/v2\/pages\/"}],"about":[{"href":"https:\/\/www.cdta.dz\/fr\/wp-json\/wp\/v2\/types\/page\/"}],"author":[{"embeddable":true,"href":"https:\/\/www.cdta.dz\/fr\/wp-json\/wp\/v2\/users\/46\/"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cdta.dz\/fr\/wp-json\/wp\/v2\/comments\/?post=7641"}],"version-history":[{"count":0,"href":"https:\/\/www.cdta.dz\/fr\/wp-json\/wp\/v2\/pages\/7641\/revisions\/"}],"up":[{"embeddable":true,"href":"https:\/\/www.cdta.dz\/fr\/wp-json\/wp\/v2\/pages\/6875\/"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cdta.dz\/fr\/wp-json\/wp\/v2\/media\/2195\/"}],"wp:attachment":[{"href":"https:\/\/www.cdta.dz\/fr\/wp-json\/wp\/v2\/media\/?parent=7641"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}