Process & characterization

This area contains equipment’s used for physical process technics and specific characterization methods dedicated for fabrication of MEMS devices.

This process & characterization area consists of the following equipment:

• Electronics test equipment,
• 1200°C Dual Zone Split Tube Furnace,
• Step profilometer (DEKTAK IIA),
• Light optical microscope,
• Gas sensor test bench,
• small scale mechanical characterization test bench (under development).