Process & Characterization

This area contains equipment’s used for physical process technics and specific characterization methods dedicated for fabrication of MEMS devices.

This process & characterization area consists of the following equipment:

  • Electronics test equipment,
  • 1200°C Dual Zone Split Tube Furnace,
  • Step profilometer (DEKTAK IIA),
  • Light optical microscope,
  • Gas sensor test bench,
  • small scale mechanical characterization test bench (under development).

Process & characterization area

Electronics test equipment

1200°C Dual Zone Split Tube Furnace

Step profilometer (DEKTAK IIA)

Light optical microscope

Gas sensor test bench