Abstract; In this paper, we prove theoretically and experimentally the existence of complete ultrasonic band gap in phononic crystal beam. The phononic beam structure studied is composed of a linear lattice array of square pillars on a beam, made with aluminum-fortal easily machinable at centimetric scale. Ultrasonic characterization of phononic beam guides shows the existence […]
October 16, 2019 Rachid SIKADOUR 2013, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Aluminum, Columns (Structural), Energy gap
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Abstract; Piezoelectric properties of ZnO thin films have been investigated for micro-electro-mechanical systems (MEMS). Wurtzite ZnO structure was prepared on different substrates (Si (1 0 0), Pt (1 1 1)/Ti/SiO2/Si and Al (1 1 1)/SiO2/Si) at different substrate temperatures (from 100 to 500 °C) by a pulsed laser deposition (PLD) technique. X-ray diffraction (XRD) characterization showed that the ZnO films were highly c-axis […]
October 16, 2019 Rachid SIKADOUR 2014, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Bulk acoustic waves (BAW), Pulsed laser deposition (PLD), Thin films Piezoelectricity
Abstract; The electromechanical response of a chemical gas sensor based on a TFBAR (Thin Film Bulk Acoustic Resonator) structure coated with a sensitive polymer layer was simulated with a FEM (Finite Elements Method) software (COMSOL Multiphysics®). The principle of sensing is based on the change of the mechanical properties of the polymer due to the […]
October 16, 2019 Rachid SIKADOUR 2015, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Gas Sensor, TFBAR, ZnO
Abstract; This paper presents a preliminary comparative study for two different guard rings structures in the purpose of evaluating their electrical performances. The two structures are based on the n-in-p technology with different implant type of guard rings. I–V characteristics have been simulated using Silvaco/ATLAS software for both structures and compared for various parameters of […]
October 16, 2019 Rachid SIKADOUR 2016, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Breakdown voltage, silicon detector, TCAD simulation
Abstract; Fast, reliable and selective detection of microorganisms is of uttermost importance in clinical analysis, but also in food and water quality monitoring. In this study, we report on the construction of an immunosensor for sensitive and selective electrochemical detection of uropathogenic Escherichia coli (E. coli) UTI89 bacteria in aqueous and serum samples. We took benefit of […]
October 15, 2019 Rachid SIKADOUR 2017, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Electrophoretic deposition, Polyethyleneimine, Reduced graphene oxide
Abstract; Self-assembly through phase separation in block copolymers (BCPs) thin films represents an attractive route to create spontaneously ordered patterns at the sublithographic range. The cost effectiveness, the fast parallel processing time as well as the compatibility with the standard microelectronics technologies make it among the most promising techniques to meet the ever challenging feature […]
October 15, 2019 Rachid SIKADOUR 2017, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Block copolymer, Microphase separation, Self-assembly
Abstract; An electrical response of a microflow sensor would open a wide horizon of uses and should intensify the integration of MEMS (Micro-Electro-Mechanical-System) microfluidic-based LOC (Lab-On-Chip). This paper presents an original microflow sensor which will be able to measure a low fluid flow rate. The sensor is designed and optimized using a multiphysics modelling and […]
October 15, 2019 Rachid SIKADOUR 2017, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Method Simulation Electrical, Microfluidic Device Finite Element, PDMS
Abstract; Zinc oxide (ZnO) thin films were deposited by pulsed laser deposition technique for making ZnO/Al/SiO2/Si Bulk and Surface Acoustic Wave (BAW and SAW) transducers. The aim is to improve the piezoelectric properties of the ZnO films, which are strongly linked to their texture and microstructure. ZnO films with a wurtzite structure were deposited on […]
October 15, 2019 Rachid SIKADOUR 2017, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division BAW and SAW, Pulsed laser deposition, ZnO
Abstract; In this work, we investigate numerically the propagation of Lamb waves in a film bulk acoustic resonator (FBAR) structure formed by piezoelectric ZnO layer sandwiched between two Mo electrodes coupled with Bragg reflectors; the system is thus considered as a phononic-crystal (PnC) plate. The aim is to suppress the first-order symmetric Lamb wave mode […]
October 15, 2019 Rachid SIKADOUR 2018, Micro-Electro-Mechanical Systems and Sensors Team, Microelectronic & Nanotechnologie Division Electro-mechanical systems, Sensors and actuators, Vibration control
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